Semibot has decades of experience in design, construction and implementation of semiconductor wafer handling systems. We can build complete systems using new or previously owned robotic subsystems and can produce EFEM that can be custom configured to compliment the customer’s industrial design. We will incorporate the design features of the customer’s tool and integrate them into the EFEM giving the final integrated tool a consistent look.
Semibot can design custom automated subsystems to meet special wafer handling requirements. We can provide cassette platforms, tilters, transfer devices and other specialty devices. With experience from both the OEM robotics and tool equipment sectors of the Semiconductor Industry, Semibot can do custom automation design and automation integration projects for our OEM partners. Please contact us for a specialized quotation.